鐣跺墠浣嶇疆锛�鐔辫檿鐞嗙垚鐨勭壒榛�:
(1)鍤存牸鐨勭湡绌哄瘑灏�:鐪炬墍鍛ㄧ煡锛岄噾灞浂浠剁殑鐪熺┖鐔辫檿鐞嗘槸鍦ㄥ皝闁夌殑鐪熺┖鐖愪腑閫茶鐨�銆傚洜姝わ紝鐛插緱骞朵繚鎸佺垚瀛愮殑鍘熷婕忛ⅷ鐜�锛屼繚璀夌湡绌虹垚鐨勫伐浣滅湡绌哄害锛屽皪淇濊瓑闆朵欢鐨勭湡绌虹啽铏曠悊璩�(zh矛)閲忓叿鏈夐噸瑕佹剰缇�銆傛墍浠acuum 鐔辫檿鐞嗙垚鐨勪竴鍊嬮棞(gu膩n)閸靛晱椤屽氨鏄鏈変竴鍊嬪彲闈犵殑鐪熺┖瀵嗗皝绲�(ji茅)妲�(g貌u)銆傜偤浜嗕繚璀夌湡绌虹垚鐨勭湡绌烘€ц兘锛寁acuum 鐔辫檿鐞嗙垚 structure鐨勮ō(sh猫)瑷堝繀闋堥伒寰竴鍊嬪熀鏈師鍓�锛屽嵆鐖愰珨閲囩敤姘ｅ瘑鐒婃帴锛屽悓鏅傜洝閲忓皯闁嬫垨涓嶉枊瀛旀礊锛岄噰鐢ㄦ垨閬垮厤鍕曞瘑灏佺祼(ji茅)妲�(g貌u)锛屾渶澶ч檺搴﹀湴娓涘皯鐪熺┖娉勬紡鐨勬鏈冦€傚畨瑁濆湪鐪熺┖鐖愰珨涓婄殑鍏冧欢鍜岄檮浠�锛屽姘村喎闆绘サ鍜岀啽闆诲伓寮曞嚭瑁濈疆锛屼篃蹇呴爤瑷�(sh猫)瑷堟湁瀵嗗皝绲�(ji茅)妲�(g貌u)銆�
(2)绲曞ぇ閮ㄥ垎鍔犵啽淇濇韩鏉愭枡鍙兘鍦ㄧ湡绌轰腑浣跨敤:鐔辫檿鐞嗙垚鍔犵啽淇濇韩瑗噷鏉愭枡宸ヤ綔鍦ㄧ湡绌哄拰楂樻韩涓紝鍥犳瑕佹眰閫欎簺鏉愭枡鑰愰珮婧�銆佽捀姹藉浣�銆佹暎鐔辨晥鏋滃ソ銆佸皫鐔辩郴鏁�(sh霉)浣�銆傚皪鎶楁哀鍖栨€ц兘瑕佹眰涓嶉珮銆傚洜姝�锛岄壄銆侀帰銆侀壃鍜岀煶澧ㄨ寤ｆ硾鐢ㄤ綔鐪熺┖鐔辫檿鐞嗙垚涓殑鍔犵啽鍜岄殧鐔辨潗鏂�銆傞€欎簺鏉愭枡鍦ㄥぇ姘ｄ腑瀹规槗琚哀鍖�锛屾墍浠ュ父瑕�(gu墨)鐔辫檿鐞嗙垚涓嶈兘浣跨敤閫欎簺鍔犵啽淇濇韩鏉愭枡銆�
(3)姘村喎瑁濈疆銆佺啽铏曠悊鐖愮垚娈笺€佺垚钃�銆侀浕鐔卞厓浠躲€佹按鍐烽浕妤�銆佷腑闁撶湡绌洪殧鐔遍杸绛夐儴浠讹紝鍧囧湪鐪熺┖鍔犵啽鐙€鎱�(t脿i)涓嬪伐浣�銆傚湪閫欐ǎ妤靛叾涓嶅埄鐨勬浠朵笅宸ヤ綔锛屽繀闋堜繚璀夊悇閮ㄤ欢绲�(ji茅)妲�(g貌u)涓嶈畩褰�銆佷笉鎼嶅锛岀湡绌哄瘑灏佸湀涓嶉亷鐔�銆佷笉鐕掓瘈銆傚洜姝�锛屾噳(y墨ng)鏍规摎(j霉)涓嶅悓鎯呮硜鐐烘瘡鍊嬮儴浠惰ō(sh猫)缃按鍐疯缃�锛屼互纰轰繚鐪熺┖鐔辫檿鐞嗙垚鑳藉姝ｅ父閬嬭骞舵湁瓒冲鐨勪娇鐢ㄥ＝鍛�銆�
(4)浣跨敤浣庨浕澹撳ぇ闆绘祦:鍦ㄧ湡绌哄鍣ㄤ腑锛岀暥鐪熺┖绌轰綅鍦ㄥ咕鎵�-1脳10-1鎵樼殑鑼冨湇鍏�(n猫i)鏅傦紝鐪熺┖瀹瑰櫒涓殑甯堕浕灏庨珨鏈冨湪杓冮珮鐨勯浕澹撲笅鐢�(ch菐n)鐢熻紳鍏夋斁闆�銆傚湪鐪熺┖鐔辫檿鐞嗙垚涓紝鏈冪櫦(f膩)鐢熷毚閲嶇殑闆诲姬鏀鹃浕锛岀噿澹為浕鐔卞厓浠跺拰闅旂啽灞�锛岄€犳垚鍤撮噸鐨勪簨鏁呭拰鎼嶅け銆傛墍浠ョ啽铏曠悊鐖愰浕鐔卞厓浠剁殑宸ヤ綔闆诲涓€鑸笉瓒呴亷80-100浼�銆傚悓鏅�锛屽湪闆荤啽鍏冧欢鐨勭祼(ji茅)妲�(g貌u)瑷�(sh猫)瑷堜笂鎳�(y墨ng)閲囧彇鏈夋晥鎺柦锛屽鐩￠噺閬块枊灏栭姵閮ㄥ垎锛岄浕妤甸枔璺濅笉鑳介亷绐�锛岄槻姝㈣紳鍏夋斁闆绘垨闆诲姬鏀鹃浕銆�
(5)鑷嫊鍖栫▼搴﹂珮:鐔辫檿鐞嗙垚鐨勮嚜鍕曞寲绋嬪害楂樻槸鍥犵偤閲戝爆宸ヤ欢鐨勫姞鐔�銆佸喎鍗荤瓑鎿嶄綔闇€瑕佸崄骞惧€嬬敋鑷冲咕鍗佸€嬪嫊浣滄墠鑳藉畬鎴�銆傞€欎簺鎿嶄綔鍦ㄧ湡绌虹啽铏曠悊鐖愪腑閫茶锛屾搷浣滃摗鐒℃硶瑷晱銆傚悓鏅�锛屾湁浜涘嫊浣�锛屽鍔犵啽淇濇韩鍚�锛岄噾灞伐浠剁殑娣伀閬庣▼闇€瑕�6鍊嬪嫊浣�锛屾噳(y墨ng)鍦�15绉掑収(n猫i)瀹屾垚銆傚湪濡傛蹇€熺殑姊濅欢涓嬪畬鎴愬緢澶氬嫊浣�锛屽鏄撲娇鎿嶄綔鑰呯穵寮�锛岄€犳垚瑾ゆ搷浣溿€傛墍浠ュ彧鏈夐珮搴﹁嚜鍕曞寲鎵嶈兘婧栫⒑鍙婃檪鐨勬寜鐓х▼搴忓崝(xi茅)瑾�(di脿o)鍕曚綔銆�
鐔辫檿鐞嗙垚甯歌瓨:
1.鍦ㄧ湡绌虹垚涓檿鐞嗛垿鍚堥噾鏅�锛屼笉瀹滅敤姘埃浣滅偤鍐峰嵒姘ｉ珨锛屽洜鐐洪垿鍜屾爱姘ｅ湪楂樻韩涓嬪弽鎳�(y墨ng)鐢熸垚閲戦粌鑹茬殑姘寲閳�銆�
2.鐪熺┖鐖愮殑娲诲嫊閫ｆ帴閮ㄥ垎鍏ㄩ儴閲囩敤O鍨嬫鑶犲湀瀵嗗皝锛岃┎閮ㄥ垎閲囩敤姘村喎銆�
3.宸ヤ欢鍦ㄧ湡绌轰腑娣伀鏅�锛屾噳(y墨ng)浣跨敤鐪熺┖娣伀娌�锛屽叾椋藉拰钂告苯澹撹純浣�銆�
4.鐪熺┖鐖愮殑缍瑕佸湪鐪熺┖鎴栫磾姘埃鐙€鎱�(t脿i)涓�锛岄伩鍏嶅钩鏅備笉鐢ㄦ檪鍚稿叆鍜屽惛鏀舵按鍒�銆�
5.鍦嬪収(n猫i)鐪熺┖鐖愮殑鍗囧閫熺巼鎳�(y墨ng)涓嶅ぇ浜�1.33Pa/h锛屽湅澶栭儴鍒嗕紒妤�(y猫)鐨勬婧栨槸0.67 Pa/h銆�
6.鐪熺┖鍔犵啽浠ヨ蓟灏勭偤涓伙紝宸ヤ欢鍦ㄧ垚鍏�(n猫i)瑕佷繚鎸佷竴瀹氳窛闆�銆�
7.鍦ㄥ姞鐔遍亷绋嬩腑锛岀垚鍏�(n猫i)鐨勫伐浠跺拰鐗╂枡鏈冩斁姘�锛岄檷浣庣湡绌哄害銆�
8.鐪熺┖鍥炵伀銆佺湡绌洪€€鐏�銆佺湡绌哄浐婧惰檿鐞嗗拰鐪熺┖鏅傛晥鐨勫姞鐔辨韩搴︿竴鑸垏甯歌(gu墨)铏曠悊鐩稿悓銆�
9.鐔辫檿鐞嗙垚鎳�(y墨ng)鍏锋湁蹇€熷喎鍗昏缃€傚喎鍗绘按澹撳姏鎳�(y墨ng)澶т簬0.2Mpa锛屾祦閲忔噳(y墨ng)鍙(di脿o)銆�
10.鍐峰嵒姘ｉ珨:閶间竴鑸敤99.995%绱斿害鐨勬爱姘�锛岄珮婧悎閲戠敤99.999%姘埃鎴栨艾姘�锛岄垿鍚堥噾鐢�99.995%姘埃銆�
11.鍗囨韩:宸ヤ欢鏀惧叆鍚�锛屽彲閫氶亷闋�(y霉)鎶藉姞鐔辫嚦6.67Pa銆�
涓嬩竴闋侊細娣伀鐖愮垚娈奸枊瑁傜殑鍘熷洜
